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CLEAN TRACK LITHIUS Pro Z is TEL's most advanced 300mm process coater/developer for 20nm and beyond technology nodes. The LITHIUS Pro Z incorporates user-friendly operation, flexible configurations for future processes and automated monitoring technologies to support a wide range of applications for next generation development to high volume mass production. When compared to previous generation LITHIUS Pro and Pro V, the LITHIUS Pro Z improves performance in 3 key areas - defectivity, productivity and CoO (cost of ownership).

Features

Low particle wafer transfer system

Improved Overall Equipment Efficiency (OEE) for litho cells

Reduced Cost of Chemicals (CoC) and energy usage

Applications

All lithography process